Plano Components

Air bearings 

Air bearings are used in all kind of high accuracy applications like positioning systems, wafer steppers, and measurement machines, which all demand an ultra high motion precision. These air bearings support and guide objects on a thin film of air with air gaps below 10 μm. They take care of near absolute repeatability, friction free movement and very low vibration levels, making high accuracy measurements possible.

Accuracies

In order for the machines to perform remarkable accurate positioning movements the air bearings also need to be very accurate in their surface form. Sumipro has made air bearings till sizes of 300 mm in diameter within surface flatness of 1 μm (please refer to the interferogram)

More information
For more information on our plano aluminium capabilities, please contact us for our custom-made solutions in precision tooling and optics.